TEL 2L87-085048-V1 Heating Controller
Product Manual：
TEL 2L87-085048-V1 Heating Controller
Introduction: TEL 2L87-085048-V1 is an original temperature control heating controller for Tokyo Electronic Semiconductor Etching Equipment, which accurately controls chamber heating and is suitable for continuous process operation in clean rooms.
Built in PID constant temperature algorithm, with minimal temperature fluctuations to ensure stable wafer processing
Multi channel temperature acquisition channel, capable of connecting multiple sets of thermocouple sensors
Controllable power output, smooth adjustment of heating wire heating rate
Integrated multiple safety protections against overheating, overcurrent, and short circuit
Onboard EMI filtering circuit to isolate electromagnetic signal interference in the workshop
Independent signal isolation circuit, temperature measurement data without clutter offset
Standard equipment communication interface, real-time upload temperature data to the main control of the whole machine
Equipped with self check for faults, quickly locate heating faults with abnormal codes
Small modular structure, easy and effortless disassembly and replacement of cabinets
Industrial wide temperature element device, stable high and low temperature operation around the cavity
Original factory standard wiring terminals, firmly plugged in to reduce poor contact
Low power circuit design, controllable temperature rise during long-term operation
Metal reinforced shell, dustproof and seismic resistant, in compliance with cleanroom standards
Unified installation size, can directly replace old controllers of the same model
Factory full load temperature calibration, high consistency of temperature control parameters
Conclusion: TEL 2L87-085048-V1 has precise temperature control and complete protection, and is a special control accessory for replacing the original semiconductor process chamber heating system.
Product detailed pictures：
2L87-085048-V1
product video
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