Novellus 02-351553-0 Digital Dynamic Controller   

Product Manual：

Novellus 02-351553-0 Digital Dynamic Controller
Introduction: Novellus 02-351553-0 Digital Motion Control Board for Thin Film Deposition Equipment, controls wafer transfer and chamber movements.
Real time processing of wafer transfer and lifting mechanism motion logic
Multi channel digital IO acquisition limit and sensor feedback signals
Optocoupler isolation circuit to isolate radio frequency electromagnetic interference
Closed loop dynamic adjustment ensures stable motion positioning accuracy
Multi channel output instructions to drive stepper/servo actuators
Onboard filtering circuit to avoid signal jitter and misoperation
Supporting communication interface, interact with the main control of the whole machine for process data exchange

Integrated overcurrent, short circuit, overload fault alarm protection
Status indicator light, quickly locate circuit and motion faults
Layered shielding PCB, strong and weak electrical zoning without signal crosstalk
24V standard machine power supply, compatible with Novellus coating platform
Installation of plug-in card rack, disassembly and replacement without changing the wiring
Store motion operation logs for easy fault tracing and maintenance
Industrial wide temperature element device, long-term stable operation around the cavity
Factory online aging calibration, high consistency of process repetition
Conclusion: Novellus 02-351553-0 has precise and stable motion control, and is a core control spare part for semiconductor PVD coating equipment.

Product detailed pictures：

02-351553-0

product video

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