DAIHEN SR-204333 RF Matcher  

Product Manual：

DAIHEN SR-204333 RF Matcher
Introduction: DAIHEN SR-204333 is a semiconductor machine 5kW/13.56MHz automatic RF matching device.
Standard 13.56MHz frequency band, rated 5 kW power output
Fast automatic tuning, stable plasma cavity impedance
Reduce reflected power and protect the RF power supply host
Built in water-cooled heat dissipation, high load for a long time without high temperature
Copper RF channel with low power transmission loss
Communication interface directly connected to the main control of the machine, real-time data transmission
Real time monitoring of standing waves and temperature, immediate alarm for abnormalities

Multiple safety protections against overheating, overcurrent, and high standing waves
Precision adjustable capacitors and inductors with high matching accuracy
Power off to retain process parameters, restart without recalibration required
All metal sealed shell, suitable for dust-free clean workshops
Standardized RF and communication interfaces, easy to disassemble and assemble
Anti electromagnetic interference, stable operation of multiple RF devices in the same cabinet
Compact integrated structure, saving cabinet installation space
Original factory compatible TEL etching and coating equipment, compatible with machines
Conclusion: DAIHEN SR-204333 has fast matching response and stable operation, making it a core RF spare part for semiconductor plasma processes.

Product detailed pictures：

SR-204333

product video

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