Daihen SVD-121-X1784 Wafer Alignment Instrument  

Product Manual：

Daihen SVD-121-X1784 Wafer Alignment Instrument
Introduction: Daihen SVD-121-X1784 is a semiconductor device specific wafer pre alignment module used for precise positioning and correction of wafer centers and notches.
Compatible with mainstream 300mm silicon wafers, matched with thin film and etching equipment
Vacuum ceramic suction cup, low dust protection for wafer surface
Optical sensors quickly identify wafer edges and notches
Direct drive rotating structure, high positioning accuracy, low operating vibration
Clean grade sealed structure, meeting the standards of dust-free workshops
Built in vacuum monitoring, no negative pressure automatic shutdown protection
Multiple sets of limit sensing to prevent wafer collision and damage

Standard communication interface, directly connected to the main control system of the device
Integrated module for the whole machine, easy to disassemble and replace
Power on automatic self check, quickly troubleshoot sensor faults
Corrosion resistant and lightweight body, suitable for process environment
Standard installation holes, replace with original parts directly
Short single alignment cycle, improving production line capacity
Multiple circuit protection to resist electromagnetic interference from the cavity
Wear resistant and long-lasting accessories, reducing production line downtime for maintenance
Conclusion: Daihen SVD-121-X1784 has high alignment accuracy and excellent cleanliness, and is the core calibration component of wafer transfer systems.

Product detailed pictures：

SVD-121-X1784

product video

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