LAM 02-405890-00 Digital Dynamic Controller  

Product Manual：

LAM 02-405890-00 Digital Dynamic Controller
Introduction: LAM 02-405890-00 is a dedicated process control module for etching equipment, which controls various process parameters of the cavity.
Compatible with LAM etching equipment, original replacement parts
Multi channel synchronous control of air pressure, radio frequency, and pressure
Signal isolation design, resistant to plasma electromagnetic interference
High speed closed-loop regulation, stable etching process
Compatible with SECS/GEM and compatible with upper level systems
Equipped with indicator lights, the fault location is clear at a glance
Automatic self check upon startup, quick troubleshooting for abnormalities
Equipped with overvoltage, overheating, and short circuit protection functions

Metal dustproof shell, suitable for dust-free workshops
Plug in installation of the whole machine, easy to replace
Local storage of multiple sets of production process formulas
Support online firmware upgrade without disassembling the device
Real time collection and recording of all production data
Standard interface, no need to change the wiring for direct installation and use
Durable industrial components reduce downtime for maintenance
Conclusion: LAM 02-405890-00 has stable control and is a core control spare part for etching equipment.

Product detailed pictures：

02-405890-00

product video

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