VAT 02112-AA44-0001 Rectangular Gate Valve  

Product Manual：

VAT 02112-AA44-0001 Rectangular Gate Valve
Introduction: VAT 02112-AA44-0001 Semiconductor Vacuum Rectangular Gate Valve, controls the opening and closing of the control chamber, and is suitable for high vacuum process environments.
Rectangular diameter design, compatible with standard interfaces of vacuum chambers
High precision sealing structure, low vacuum leakage rate
Pneumatic driven opening and closing, smooth and rapid switch action
Built in position feedback, real-time feedback on valve status
Corrosion resistant seals, resistant to special process gases
Clean treatment of metal valve body, suitable for wafer production line
Multiple limit protection to prevent damage to the valve plate caused by overshoot
Anti vibration structure, the machine is not prone to air leakage during operation

Standard communication signal output, connected to equipment master control
Low temperature rise operation does not affect the temperature environment of the chamber
Easy disassembly and assembly structure, time-saving maintenance and replacement
Surface polishing to prevent pollution and reduce particle generation
Suitable for various vacuum equipment such as etching and thin film deposition
Long term opening and closing cycle, long-lasting service life
Factory vacuum leak test, stable and reliable performance
Conclusion: VAT 02112-AA44-0001 has excellent sealing and control performance, maintaining the vacuum degree of the chamber and reducing abnormal shutdown of equipment processes.

Product detailed pictures：

02112-AA44-0001

product video

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