НДС 02112-AA44-0001 Задвижка прямоугольная
Руководство по продукту：
НДС 02112-AA44-0001 Задвижка прямоугольная
Введение: VAT 02112-AA44-0001 Semiconductor Vacuum Rectangular Gate Valve, controls the opening and closing of the control chamber, and is suitable for high vacuum process environments.
Rectangular diameter design, compatible with standard interfaces of vacuum chambers
Высокоточная уплотнительная конструкция, low vacuum leakage rate
Pneumatic driven opening and closing, smooth and rapid switch action
Built in position feedback, real-time feedback on valve status
Corrosion resistant seals, resistant to special process gases
Clean treatment of metal valve body, suitable for wafer production line
Multiple limit protection to prevent damage to the valve plate caused by overshoot
Антивибрационная структура, the machine is not prone to air leakage during operation
Standard communication signal output, connected to equipment master control
Low temperature rise operation does not affect the temperature environment of the chamber
Easy disassembly and assembly structure, экономия времени на техническое обслуживание и замену
Surface polishing to prevent pollution and reduce particle generation
Suitable for various vacuum equipment such as etching and thin film deposition
Long term opening and closing cycle, длительный срок службы
Factory vacuum leak test, стабильная и надежная работа
Заключение: VAT 02112-AA44-0001 has excellent sealing and control performance, maintaining the vacuum degree of the chamber and reducing abnormal shutdown of equipment processes.
Подробные фотографии продукта：
02112-AA44-0001
видео о продукте
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