DAIHEN SVD-002-X0834 aligner
Product Manual：
The DAIHEN SVD-002-X0834 aligner is a high-precision positioning accessory for wafer transfer equipment. The DAIHEN SVD-002-X0834 aligner is compatible with DAIHEN plasma semiconductor machines. The 15 product features are as follows:
High definition optical imaging module, precise and fast recognition of wafer edge contours
Micron level repetitive positioning accuracy, reducing wafer offset and improving process yield
Built in digital image processing chip, real-time coordinate correction operation completed
Multi level light source with adjustable brightness, suitable for various types of transparent and silicon wafers
Anti dust sealed lens structure, making the chamber environment less prone to fogging and dirt
Servo closed-loop adjustment structure, XY axis fine adjustment response without hysteresis or lag
Standard communication interface, capable of directly connecting to the main control of the device to synchronize positioning data
Built in offset alarm program, automatic shutdown protection for wafers beyond tolerance
Wide temperature stable operation, no drift in high-temperature environmental parameters during the process
All metal anti-corrosion shell, resistant to trace corrosive gases in the process
Small integrated design, easy disassembly and replacement of cabinets
Multiple circuit protection, over-current and over-voltage to prevent module burnout faults
Original optical calibration from the factory, no need to recalibrate parameters on the machine
Strong anti electromagnetic interference shielding, isolating the influence of RF power clutter
Compatible with multi size wafers, compatible with 8-inch and 12 inch transfer stations
DAIHEN SVD-002-X0834 aligner is a core component for etching and thin film equipment wafer positioning maintenance
Product detailed pictures：
SVD-002-X0834
product video
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