MKS 631D13T8FH Capacitive Pressure Gauge
Product Manual：
The MKS 631D13T8FH capacitive pressure gauge is a high-precision pressure measurement core accessory for semiconductor vacuum equipment. The MKS 631D13T8FH capacitive pressure gauge is suitable for etching and CVD high-temperature vacuum processes. The 15 product features are as follows:
Built in constant temperature heating structure, stable temperature control of 150 ℃ to suppress the adhesion of process by-products
Inconel alloy induction film, corrosion-resistant and compatible with various process gases
Absolute capacitance sensing principle, measurement values are not affected by gas composition
Measurement accuracy reaches 0.5% reading level, with a full range resolution of 0.01% FS
Patent etched baffle to block condensation impurities and reduce zero drift
0-10VDC standard analog output, linearly corresponding to vacuum pressure values
Dual independent pressure alarm relay, threshold can be freely adjusted from 0.5% to 100%
Unified power supply of ± 15VDC, integrated driver circuit does not require external signal module
DB15 standard pin interface, stable wiring compatible with industrial control acquisition system
8VCR sealed joint, with strong vacuum sealing and no leakage hazards
Compact integrated body, reducing volume by 40% compared to the old model, saving cabinet space
Ultra low pressure temperature drift coefficient, with no deviation in numerical values during long-term continuous operation
Resistant to 45psi overpressure impact, instantaneous pressure fluctuations do not damage the sensor
The whole machine is calibrated for aging at the factory, and can be used directly without recalibration
All metal shielding shell, resistant to electromagnetic interference in the workshop, ensuring stable pressure measurement
The MKS 631D13T8FH capacitive pressure gauge is a specialized vacuum pressure detection component for repairing and replacing thin film deposition and wafer etching equipment
Product detailed pictures：
631D13T8FH
product video
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