AMAT 0190-08005 servo drive
Product Manual：
AMAT 0190-08005 servo driver is a precision driving component specifically designed for semiconductor equipment in application materials. The AMAT 0190-08005 servo driver drives a robotic arm and a carrier platform to achieve precise wafer displacement. It has 15 features:
Three closed-loop control modes are available: position, speed, and torque
S-shaped acceleration and deceleration operation, smooth wafer handling without impact or shaking
Fast response speed and high repeat positioning accuracy
Support differential encoder, real-time and accurate collection of motor position feedback
Control circuit optoelectronic isolation to resist cavity RF interference
Equipped with a dedicated communication bus, it can transmit real-time motion commands to the main control
Integrated overcurrent, overvoltage, overheating, and short circuit all-round protection
Equipped with a built-in fault display light, quickly identify equipment movement faults
Parameter power-off automatic storage, no need to reset when restarting
Metal shielding shell reduces electromagnetic signal interference
Small modular design, cabinet installation occupies less space
Tighten the wiring terminals to ensure stable and secure connection of the circuit without easy loosening
Built in hardware filtering, filtering electromagnetic clutter in the workshop
Adapt to the temperature difference environment of the dust-free workshop and can work continuously for a long time
After completing the whole machine debugging and calibration at the factory, it can be adapted to the transmission mechanism on the machine
AMAT 0190-08005 servo drive has stable operation and high precision, and is a core drive component for repairing and replacing the handling mechanism of thin film and etching machines
Product detailed pictures：
0190-08005
product video
Other links
GE UR6CH Analog I/O module
ACQUISITIONLOGIC AL81G communication module
AC 800PEC XUD194A Optical fiber repeater
Other links
BENTLY 3500/25 184684-01 Monitor module
PM510V16 3BSE008358R1 processor module
PM511V08 3BSE011180R1 processor module
