VAT A-2352575 actuator
Product Manual：
VAT A-2352575 is a precision actuator for semiconductor vacuum valves, with fast opening and closing, reliable sealing, and suitable for high vacuum etching chambers. Its characteristics are as follows:
1. VAT A-2352575 integrated compact structure, clean room installation occupies small space
2. Fast driving response speed, short emergency cut-off time, and prevention of process gas reflux
3. Built in high-precision position feedback, precise and stable valve opening control
4. Specialized anti deposition coating reduces the adhesion of process by-products and has a long maintenance cycle
5. FFKM corrosion-resistant seal, suitable for various corrosive process gases
6. Multiple self-locking structure, automatic valve closure upon power failure, with fault safety protection
7. Low leakage sealing design, leakage rate meets semiconductor high vacuum standards
8. Metal shielding shell, resistant to plasma electromagnetic interference in the cavity
9. Modular disassembly and assembly design allows for independent replacement of actuators without disassembling the valve body
10. Compatible with standard vacuum flanges and mainstream vacuum pipeline specifications
11. Stable operation with wide temperature range, no lag in the action of high and low temperature chamber working conditions
12. Built in overvoltage and overload limit protection to prevent damage to the mechanism caused by overload
13. Low friction transmission structure, long service life after millions of cycles
14. Standardized signal interface, capable of remote control of equipment main control system through docking
15. Equipped with VAT series vacuum gate valves and quick stop valves, used for wafer etching and coating equipment
ending
The VAT A-2352575 actuator opens and closes quickly, is sealed and corrosion-resistant, and is the core driving component of semiconductor vacuum process pipelines.
Product detailed pictures：
A-2352575
product video
Other links
REXROTH VT-HNC100-1-22W-08-C-0 Servo controller
GE 3509301007768 Board Control module
GE V7768-320000 Board Control module
Other links
REXROTH VT-HNC100-1-22W-08-C-0 Servo controller
GE 3509301007768 Board Control module
GE V7768-320000 Board Control module
