MKS 1179A21CR1BV Mass Flow Controller  

Product Manual：

MKS 1179A21CR1BV quality flow controller is used for semiconductor equipment to accurately control process gas flow and ensure process stability
1. High precision flow control and stable gas output
2. Fast response speed, able to quickly reach the set flow rate
3 Supports standard communication for easy control system integration
4 built-in sensors for real-time monitoring of traffic status
5. Equipped with traffic over limit alarm function
6 built-in multiple protections to resist the influence of gas impurities
7 MKS 1179A21CR1BV is compatible with various process gases

Excellent sealing performance, eliminating the risk of gas leakage
9-range matching semiconductor thin film and etching process requirements
10 temperature resistance characteristics suitable for clean cabinet environment
11 valve body structure is compact, saving equipment installation space
12 parameters can be stably saved, and there is no need to reset them when restarting
The MKS 1179A21CR1BV quality flow controller has precise control and is an important gas control component in semiconductor processes

Product detailed pictures：

1179A21CR1BV

product video

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