Регулятор массового расхода MKS 1179A21CR1BV
Руководство по продукту：
MKS 1179A21CR1BV quality flow controller is used for semiconductor equipment to accurately control process gas flow and ensure process stability
1. High precision flow control and stable gas output
2. Быстрая скорость ответа, able to quickly reach the set flow rate
3 Supports standard communication for easy control system integration
4 built-in sensors for real-time monitoring of traffic status
5. Equipped with traffic over limit alarm function
6 built-in multiple protections to resist the influence of gas impurities
7 MKS 1179A21CR1BV is compatible with various process gases
Отличные характеристики уплотнения, eliminating the risk of gas leakage
9-range matching semiconductor thin film and etching process requirements
10 temperature resistance characteristics suitable for clean cabinet environment
11 valve body structure is compact, экономия места для установки оборудования
12 parameters can be stably saved, and there is no need to reset them when restarting
The MKS 1179A21CR1BV quality flow controller has precise control and is an important gas control component in semiconductor processes
Подробные фотографии продукта：
1179A21CR1BV
видео о продукте
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