Edwards STP-XA3203CV Turbomolecular Pump
Product Manual：
Edwards STP-XA3203CV Turbomolecular Pump
1. Ultra high vacuum maintenance in 300mm wafer dry etching chamber
2. Construction of Extreme High Vacuum inside JEOL Field Emission Electron Microscope Tube
3. Stable negative pressure extraction of ion implantation machine terminal process chamber
4. Continuous pumping operation of PECVD medium thin film deposition chamber
5. Clean ultra-high vacuum construction of MBE molecular beam epitaxy growth chamber
6. Surface analysis XPS instrument analysis chamber without oil vacuum supply
7. Semiconductor Loadlock chamber quickly rises to the process vacuum zone
8. Old production line, replacement and assembly of magnetic levitation molecular pump with the same specifications
9. Efficient diversion and suction treatment of fluoride corrosive process gas
10. Optical precision coating cavity suppresses residual gas interference in imaging
11. Equipment installation, debugging, pumping speed, extreme vacuum performance calibration and testing
12. Low vibration operation of magnetic levitation bearings adapted to high-precision detection equipment
13. The mass production workshop operates continuously under load for a long time, 24/7
14. Regular maintenance of temperature control system, circuit and bearing operation status
15. The third-generation silicon carbide chip is suitable for harsh etching conditions and air extraction
The Edwards STP-XA3203CV turbomolecular pump relies on a magnetic levitation structure and is mainly used for building ultra-high vacuum environments in high-end semiconductor processes and precision analytical instruments, as well as replacing and maintaining old pump body spare parts on site
Product detailed pictures：
product video
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