AMAT 0190-54045 Helium Low Temperature Compressor
Product Manual：
AMAT 0190-54045 Helium Low Temperature Compressor
1. Semiconductor cryogenic pump helium pressurization cycle
2. PVD coating equipment vacuum cooling matching
3. Vacuum chamber adsorbs water vapor and impurity gases
4. Low temperature pumping power supply for wafer process chamber
5. Scanning electron microscope vacuum unit supporting refrigeration
6. Power support for ion implantation machine cold trap system
7. Replace the entire machine of the same model directly if there is a production line malfunction
8. Low temperature unit gas supply for cavity degassing operation
9. Installation and commissioning, calibration of air pressure and temperature parameters
10. Closed pipeline high-purity helium gas circulation transportation
11. Etching chamber cold plate constant temperature adsorption operation
12. The production line runs continuously and stably for a long time without interruption
13. Daily maintenance and replacement of filter element sealing accessories
14. Adaptation of vacuum system for silicon carbide chip manufacturing process
15. Dust free environment, low vibration, continuous pressurized operation
AMAT 0190-54045 helium low-temperature compressor is used for helium circulation pressurization in semiconductor vacuum low-temperature equipment, and is used in conjunction with the chamber to create a high-purity vacuum environment and equipment maintenance and replacement
Product detailed pictures：
0190-54045
product video
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