Edwards ACF31B122300 Drying Vacuum Pump
Product Manual：
Edwards ACF31B122300 Drying Vacuum Pump
1. Establishment of primary vacuum through rough pumping of semiconductor process chamber in advance
2. Quick release of atmospheric pressure gas from the lock chamber of the coating equipment
3. The etching process smoothly extracts the exhaust gas generated by the process
4. The molecular pump is paired with a front-end pump to provide basic negative pressure for the high vacuum unit
5. The wafer cleaning station extracts water vapor and volatile pollutants from the chamber
6. The dust-free workshop operates without oil throughout the entire process, preventing oil contamination of the chamber
7. Suitable for gas extraction operations in mildly corrosive processes
8. On site dismantling, replacement, commissioning and production of old and identical dry pumps
9. Low vibration during operation will not interfere with the precise positioning of the machine
10. Installation verification of extraction rate, body temperature rise, and exhaust pressure
11. No need to add lubricating oil, eliminating the need for regular oil change and maintenance steps
12. Continuous and stable load operation under full day production conditions for a long time
13. Automatic shutdown protection mechanism triggered when temperature and load are abnormal
14. Daily basic maintenance can be completed by simply cleaning the intake filter element
15. Photovoltaic coating and optical vapor deposition supporting vacuum pre pumping operation
The Edwards ACF31B122300 dry oil-free vacuum pump is used as a front-end pumping equipment for semiconductor vacuum systems, with high cleanliness and simple operation and maintenance, suitable for normal production on production lines and replacement of faulty spare parts.
Product detailed pictures：
ACF31B122300
product video
Other links
CK11CE300 contactor
FOXBORO FBM202 P0926EQ thermocouple input module
ENTERASYS A4H124-24FX Ethernet Switch
Other links
5SHY3545L0016 3BHB020720R0002 module
DS200DSPCH1ADA combustion engine card
IS215UCVEM01A IS215UCVEH2AF Gas turbine card
