AMAT 0190-05624 RF Generator  

Product Manual：

AMAT 0190-05624 RF Generator
1. 900W RF power output, compatible with semiconductor process chambers
2. High power output accuracy and good process repeatability
3. Built in impedance detection, real-time monitoring of load status
4. Equipped with multiple protections for over power, over temperature, and over current
5. Support host communication and device linkage control
6. Built in fault diagnosis, capable of reading abnormal codes
7. Rack mounted installation, compatible with Endura equipment cabinets

8. Stable output signal, reducing process fluctuations
9. Support power closed-loop regulation and dynamically adapt to load changes
10. Equipped with a status indicator light, quickly determine the operating conditions
11. Air cooled cooling structure, continuous operation for a long time
12. Matchable RF Matchers Work Together
13. Support remote parameter settings for easy process debugging
14. Anti interference design, suitable for etching and coating production environment
15. Standardized interface, easy replacement and disassembly
AMAT 0190-05624 RF generator, used in semiconductor etching and coating equipment, with stable output, is the core RF power supply component of wafer process.

Product detailed pictures：

QUANTA-10D-01

product video

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