ОГРОМНЫЙ 0190-05624 РФ Генератор

Руководство по продукту：

ОГРОМНЫЙ 0190-05624 РФ Генератор
1. 900W RF power output, compatible with semiconductor process chambers
2. High power output accuracy and good process repeatability
3. Built in impedance detection, real-time monitoring of load status
4. Equipped with multiple protections for over power, перегрев, and over current
5. Support host communication and device linkage control
6. Встроенная диагностика неисправностей, capable of reading abnormal codes
7. Установка в стойку, compatible with Endura equipment cabinets

8. Стабильный выходной сигнал, reducing process fluctuations
9. Support power closed-loop regulation and dynamically adapt to load changes
10. Оборудован индикатором состояния., quickly determine the operating conditions
11. Air cooled cooling structure, continuous operation for a long time
12. Matchable RF Matchers Work Together
13. Support remote parameter settings for easy process debugging
14. Антиинтерференционный дизайн, suitable for etching and coating production environment
15. Стандартизированный интерфейс, easy replacement and disassembly
ОГРОМНЫЙ 0190-05624 RF generator, used in semiconductor etching and coating equipment, with stable output, is the core RF power supply component of wafer process.

Подробные фотографии продукта：

QUANTA-10D-01

видео о продукте

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