Pearl Kogyo RP-5000-60MA RF Generator
Product Manual：
Pearl Kogyo RP-500-60MA RF Generator
1. Specialized RF power generation unit for semiconductor plasma process
2. Power closed-loop control, high output power accuracy with small fluctuations
3. Excellent harmonic suppression ensures uniform and stable plasma discharge
4. Support pulse modulation output, suitable for etching and coating process requirements
5. Built in standing wave detection, automatic power drop protection for abnormal load
6. Equipped with multiple hardware protections for overcurrent, overtemperature, and overpower
7. Real time collection of reflected power and monitoring of cavity load status
8. Rack mounted drawer installation, compatible with machine cabinet slots
9. Air cooled heat dissipation, suitable for continuous production of 7 × 24 hours on the production line
10. Support communication bus and remote parameter tuning with machine master control
11. Store operation and fault logs for easy operation and maintenance troubleshooting and traceability
12. Status indicator light, quickly locate power supply operation faults
13. Alarm signal output, connected to the whole machine safety interlock circuit
14. Anti electromagnetic interference, stable operation in complex environments of semiconductor workshops
15. Standardized signal and RF interface, convenient disassembly and replacement of spare parts
The Pearl Kogyo RP-500-60MA RF generator provides high-frequency RF energy for semiconductor process chambers, ionizes process gases to generate plasma, and ensures the stability of wafer etching and coating processes.
Product detailed pictures：
RP-5000-60MA
product video
Other links
3FE25389AAGA circuit board
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Other links
3FE25389AAGA circuit board
3FE25389AAAB Fiber Optic Network Module
IPUCAMM1AA Control Switch Module
