Edwards NRY0G9000XS vacuum pump  

Product Manual：

Edwards NRY0G9000XS Dry Vacuum Pump
1. Edwards NRY0G9000XS oil-free dry vacuum pump
2. Oil free structure to avoid oil pollution in the process chamber
3. Configure gas town function, capable of extracting water vapor and condensable gases
4. High pumping speed, quickly establish rough vacuum
5. Built in particle filter to block dust from entering the pump body
6. RS485 communication, supports remote monitoring
7. Over temperature and overload protection, fault can trigger an alarm
8. Air cooled cooling, suitable for long-term continuous operation

9. Good sealing structure to prevent gas backflow
10. Low operating noise and minimal vibration
11. Compact body, convenient for device integration
12. Easy to maintain and convenient for on-site maintenance
13. Low power consumption, saving usage costs
14. Suitable for corrosive process gases
15. Edwards NRY0G9000XS is used as a front stage pump for turbopumps
Edwards NRY0G9000XS dry vacuum pump, a front-end pump for semiconductor vacuum systems, used for rough vacuum extraction in process chambers.

Product detailed pictures：

NRY0G9000XS

product video

Other links

57619414 interface inverter board
DILA-XH11 contactor
DILER-40-G XTRM1 0A40 Miniature Control Relay

Other links

BENTLY 9200-06-02-10-00 Monitor module
DS200DCFBG1BNC Gas combustion engine module
GE DS215KLDBG1AZZ03A DS200KLDBG1ABC module