Edwards NRY0G9000XS vacuum pump
Product Manual：
Edwards NRY0G9000XS Dry Vacuum Pump
1. Edwards NRY0G9000XS oil-free dry vacuum pump
2. Oil free structure to avoid oil pollution in the process chamber
3. Configure gas town function, capable of extracting water vapor and condensable gases
4. High pumping speed, quickly establish rough vacuum
5. Built in particle filter to block dust from entering the pump body
6. RS485 communication, supports remote monitoring
7. Over temperature and overload protection, fault can trigger an alarm
8. Air cooled cooling, suitable for long-term continuous operation
9. Good sealing structure to prevent gas backflow
10. Low operating noise and minimal vibration
11. Compact body, convenient for device integration
12. Easy to maintain and convenient for on-site maintenance
13. Low power consumption, saving usage costs
14. Suitable for corrosive process gases
15. Edwards NRY0G9000XS is used as a front stage pump for turbopumps
Edwards NRY0G9000XS dry vacuum pump, a front-end pump for semiconductor vacuum systems, used for rough vacuum extraction in process chambers.
Product detailed pictures：
NRY0G9000XS
product video
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