AMAT 0010-01711 Robot Driver  

Product Manual：

AMAT 0010-01711 Robot Driver
1. Semiconductor equipment wafer handling robot servo drive unit
2. Multi axis servo control drives the joint movements of the robotic arm
3. High precision position closed loop ensures wafer repeat positioning accuracy
4. Support software configuration adjustment of speed and torque parameters
5. Built in hardware protection against overcurrent, overvoltage, and overheating
6. Receive upper level motion commands and output motor power signals
7. Encoder signal acquisition, real-time feedback of shaft position status

8. Fault self diagnosis, outputting alarm codes for easy maintenance
9. Board card rack installation, compatible with equipment control cabinet slots
10. Anti electromagnetic interference, suitable for complex electromagnetic environments in clean workshops
11. Support high-speed start stop to meet the needs of rapid wafer handling
12. Equipped with soft limit function to prevent mechanical hard collision
13. Communication interface docking with device master to achieve linkage control
14. Long term continuous operation, suitable for 24-hour operation on the production line
15. Compatible with etching and PVD equipment wafer transfer robotic arm
AMAT 0010-01711 robot driver, used for servo motion control of internal robotic arms in semiconductor equipment.

Product detailed pictures：

0010-01711

product video

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