AE 31512411-362 DC power module  

Product Manual：

AE 31512411-362 DC power module
1. Pinnacle III series high-power DC plasma power supply unit
2. Three phase 480V AC input, high output power level
3. Support constant voltage and constant current dual-mode closed-loop control
4. Low output ripple and excellent power output stability
5. Adapt to dynamic cavity loads and adaptively adjust impedance
6. Built in overvoltage, overcurrent, overheating, and short circuit protection
7. Equipped with fault self diagnosis, output corresponding fault codes
8. Support Ethernet communication, upper computer reads and writes process parameters
9. Standard rack mounted cabinet installation, compatible with equipment control cabinets

10. Air cooled cooling structure, supporting long-term continuous operation of the production line
11. Equipped with soft start function to suppress power on surge current
12. Parameters can be configured through software and adapted to multiple sets of process formulas
13. Good electromagnetic compatibility performance, suitable for semiconductor cleanrooms
14. Support parallel connection of multiple machines to achieve power expansion
15. Commonly used in PVD sputtering, bias, and ion implantation processes
AE 31512411-362 DC power module, a high-power DC power supply equipment for semiconductor processes, provides stable power output for plasma chambers.

Product detailed pictures：

31512411-362

product video

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