Nikon 4S013-373-2 Linear Motor Controller  

Product Manual：

Nikon 4S013-373-2 Linear Motor Controller
1. NSR lithography machine dedicated WYL axis linear motor servo drive unit
2. Adaptive lithography worktable linear motion axis closed-loop servo control
3. Read grating ruler signal to achieve nanometer level positioning closed-loop
4. Supports dual mode control of position and speed, with quick motion response
5. Built in multiple hardware protections for overcurrent, overvoltage, and overheating
6. Receive the main control command of the machine and output the driving power of the linear motor
7. Installation of board card cabinet slot, compatible with Nikon lithography machine control cabinet
8. Fault self diagnosis function, outputting fault codes for easy maintenance

9. Industrial grade components, supporting 24-hour uninterrupted operation of production lines
10. Excellent electromagnetic compatibility, resistant to electromagnetic interference in the workshop
11. Equipped with soft limit protection to prevent mechanical collision of the workpiece table
12. Bus communication, real-time interaction of motion data with the overall controller
13. Driver parameters can be configured through software to adapt to different load conditions
14. High dynamic response to meet the high-speed motion requirements of scanning exposure
15. Used for Nikon NSR series lithography machine worktable displacement drive
Nikon 4S013-373-2 linear motor controller, servo drive board for lithography machine worktable, achieves high-precision linear displacement control.

Product detailed pictures：

4S013-373-2

product video

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