TEL Y331-D204CE Thermal Generator   

Product Manual：

TEL Y331-D204CE Thermal Generator
1. Tokyo Electronic Coating and Developing Machine Special Heating Generating Unit
2. Accurate temperature control output, providing heat source for the machine process chamber
3. Temperature closed-loop regulation ensures uniform and stable temperature field inside the chamber
4. Built in temperature sensor, real-time collection of actual temperature data
5. Equipped with multiple safety protection mechanisms for overheating and overload
6. Receive instructions from the main control of the machine and execute the temperature rise and constant temperature logic
7. Fault self diagnosis, outputting alarm codes for easy equipment maintenance

8. Pipeline interface integration, adapted to the internal pipeline layout of the machine
9. High temperature resistant sealing structure reduces heat leakage and loss
10. Industrial grade components, supporting 24-hour continuous operation of production lines
11. Temperature parameters can be set in software and adapted to multiple process formulas
12. Support signal feedback and provide feedback on the working status of the device to the upper level
13. Anti workshop electromagnetic interference, ensuring temperature control accuracy is not affected
14. Modular assembly, convenient on-site disassembly and replacement of spare parts
15. Mainly used in TEL lithography supporting coating and developing equipment
TEL Y331-D204CE heat generator, machine process heating assembly, provides stable and controllable heat source for semiconductor coating and development chamber.

Product detailed pictures：

Y331-D204CE

product video

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