TEL Y331-D204CE Тепловой генератор
Руководство по продукту：
TEL Y331-D204CE Тепловой генератор
1. Tokyo Electronic Coating and Developing Machine Special Heating Generating Unit
2. Accurate temperature control output, providing heat source for the machine process chamber
3. Temperature closed-loop regulation ensures uniform and stable temperature field inside the chamber
4. Built in temperature sensor, real-time collection of actual temperature data
5. Equipped with multiple safety protection mechanisms for overheating and overload
6. Receive instructions from the main control of the machine and execute the temperature rise and constant temperature logic
7. Самодиагностика неисправностей, outputting alarm codes for easy equipment maintenance
8. Pipeline interface integration, adapted to the internal pipeline layout of the machine
9. High temperature resistant sealing structure reduces heat leakage and loss
10. Компоненты промышленного класса, supporting 24-hour continuous operation of production lines
11. Temperature parameters can be set in software and adapted to multiple process formulas
12. Support signal feedback and provide feedback on the working status of the device to the upper level
13. Антимастерская электромагнитных помех, ensuring temperature control accuracy is not affected
14. Modular assembly, convenient on-site disassembly and replacement of spare parts
15. Mainly used in TEL lithography supporting coating and developing equipment
TEL Y331-D204CE heat generator, machine process heating assembly, provides stable and controllable heat source for semiconductor coating and development chamber.
Подробные фотографии продукта：
Y331-D204CE
видео о продукте
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