كاواساكي 30D60E-A331 وحدة تحكم روبوت
دليل المنتج：
KAWASAKI 30D60E-A331 Robot Controller
1. EVG photoresist coating equipment wafer handling dedicated control unit
2. Multi axis digital servo drive, high positioning repeatability accuracy
3. بنيت في كشف الاصطدام, instant shutdown protection for abnormal wafers
4. Support single arm motion control, compatible with EFEM loading and unloading
5. Compatible with Kawasaki AS robot programming language, easy to teach and debug
6. High speed bus for real-time data exchange with the robotic arm body
7. متعدد القنوات الإدخال/الإخراج, compatible with FOUP, gate control, and various sensors
8. اتصالات إيثرنت, connecting with the main control of the whole machine to achieve device linkage
9. Optimization of motion curve to reduce wafer shaking during high-speed handling
10. Multiple sets of handling process programs are stored, supporting quick retrieval
11. Independent safety emergency stop circuit, compliant with SEMI safety standards
12. التشخيص الذاتي للخطأ, saving alarm logs for easy operation and maintenance troubleshooting
13. Drawer style rack structure, compatible with cabinet slot installation
14. Forced air cooling, دعم 7 × 24-hour semiconductor mass production
15. واجهة كهربائية قياسية, good compatibility for spare parts disassembly and replacement
KAWASAKI 30D60E-A331 robot controller controls all the motion logic of the front-end robotic arm, achieving safe transfer of wafers between the wafer box and the process chamber
صور مفصلة للمنتج：
30D60E-A331
فيديو المنتج
روابط أخرى
644-0081-011 لوحة الواجهة
3لوحة وحدة التحكم DH03155ABAA
وحدة الاتصالات LNW49-049059
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