Kawasaki 50607-1223 وحدة تحكم الروبوت
دليل المنتج:
Kawasaki 50607-1223 وحدة تحكم الروبوت
Kawasaki Semiconductor Wafer Handling Robot Dedicated Servo Control Unit
Integrated multi axis servo drive, high positioning accuracy for wafer picking and placing
Fully digital closed-loop control, smooth and vibration free motion
Multi channel optical isolation IO, connected to vacuum chamber sensor
Support demonstration programming and can store multiple sets of handling programs
Built in EtherCAT communication, connected to the main control system of the entire machine
Metal enclosed shell, low release gas suitable for clean vacuum environment
Independent air duct heat dissipation, long-term continuous operation without high temperature
Multiple safety protections including emergency stop, التيار الزائد, overload, and overheating
هيكل إدخال البطاقة المعيارية, easy disassembly, صيانة, والاستبدال
Internal circuit gold-plated, stable signal transmission and anti-interference
Seismic reinforcement structure, able to withstand continuous vibration of the machine
The terminal wiring is clear, and troubleshooting is simple and intuitive
حجم صغير, saving installation space inside the cabinet
Used in conjunction with Kawasaki TS series wafer transfer robotic arm
ملخص: Kawasaki 50607-1223 has precise motion control and strong adaptability to cleanliness, making it a core control component for semiconductor wafer handling equipment.
صور مفصلة للمنتج:

50607-1223
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