ACS CM2BEM2H4-XY motion control module
Product Manual：
ACS CM2BEM2H4-XY motion control module
Introduction: ACS CM2BEM2H4-XY is a precision semiconductor equipment dedicated dual axis motion control module that controls the precise positioning of the XY platform.
Dual axis synchronous control, high synchronization degree of platform linkage operation
High speed position closed-loop operation, high positioning accuracy without offset
Multi channel communication interface, easy to connect with the upper level machine system
Line photoelectric isolation, anti workshop electromagnetic signal interference
Integrated multiple protection circuits for overload, overvoltage, and overheating
Standard modular slots, easy to disassemble, replace, and maintain
Equipped with a built-in fault indicator light for quick troubleshooting of abnormalities
Adapt to various wafer XY fine-tuning and transfer platform equipment
Wide temperature board design, capable of long-term stable workshop operations
Local storage of motion parameters, fast debugging after replacement
Compact board size reduces the space occupied by control cabinets
Gold plated terminal blocks provide long-lasting and stable anti-oxidation connections
Multiple adjustable sports modes to meet different process requirements
Original precision components, supporting 24/7 continuous operation
Can be paired with servo drive to expand multi axis motion workstations
Conclusion: The ACS CM2BEM2H4-XY motion control module precisely controls the movement of the XY platform, ensuring stable operation of semiconductor precision machining processes.
Product detailed pictures：
CM2BEM2H4-XY
product video
Other links
CHBX01R 2VAA008575R1 Redundant Module Base
5SHY4045L0006 3BHB030310R0001 thyristor module
RET670 1MRK004816-AC Control Relay
Other links
YOKOGAWA CP461-50 Communication module
PPD113B03-26-100110 3BHE023584R2634 Control module
DS200SDCCG5AHD Gas turbine module
