AE 3152313-001B power module
Product Manual：
AE 3152313-001B power module
1. Special DC power supply unit for semiconductor magnetron sputtering
2. Low output ripple and stable process output
3. Voltage and current closed-loop precise and adjustable
4. Equipped with overvoltage, overcurrent, and short-circuit protection
5. Built in temperature detection, automatic overheating protection
6. Built in fault self check, output fault signal
7. Rack slot installation, compatible with machine cabinets
8. Air cooled heat dissipation, suitable for long-term continuous production
9. Support device communication and remote setting of process parameters
10. Fast load response, adaptable to changes in sputtering load
11. Anti electromagnetic interference, stable operation in complex workshop environments
12. High power density, saving cabinet installation space
13. Status indicator light, quickly troubleshoot operational faults
14. Alarm signals can be uploaded to the machine control system
15. Standard interface, easy and convenient disassembly and replacement
AE 3152313-001B power module, commonly used in semiconductor coating and sputtering equipment, has reliable output performance and provides DC power for process chambers.
Product detailed pictures：
3152313-001B
product video
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