AE 3152412-233 DC power module
Product Manual：
AE 3152412-233 DC power module
1. High power DC plasma power supply unit for semiconductor equipment
2. Voltage and current closed-loop control, high output accuracy and low ripple
3. Support switching between constant voltage and constant current working modes
4. Built in multiple protections for overvoltage, overcurrent, overheating, and short circuit
5. Stable output power, suitable for sputtering bias process load
6. Equipped with load impedance monitoring and adaptable to dynamic changes in the cavity
7. Support remote communication, upper computer reads and writes parameters and status
8. Rack mounted cabinet installation, compatible with equipment control cabinet slots
9. Equipped with fault self diagnosis and outputting fault codes for easy maintenance
10. Air cooled cooling structure, supporting 24-hour continuous operation of the production line
11. The output parameter software can be adjusted to adapt to different process formulas
12. Anti electromagnetic interference, suitable for semiconductor cleanroom environment
13. Equipped with soft start function to suppress power on surge current
14. Multiple units can be connected in parallel to expand the output power level of the entire machine
15. Commonly used for bias power supply in PVD sputtering and etching equipment
AE 3152412-233 DC power module provides stable DC power output for semiconductor process chambers.
Product detailed pictures：
3152412-233
product video
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