AE 3156360-141 RF ablation generator
Product Manual：
AE 3156360-141 RF power supply
1. Paramount 6013 series semiconductor RF generator
2. 6000W rated output power, stable power output
3. High frequency RF output, compatible with plasma technology
4. Built in power closed-loop control, high output accuracy
5. Support impedance detection and adapt to changes in cavity load
6. Equipped with fault self diagnosis and output alarm codes
7. Support remote communication and enable upper computer parameter settings
8. Rack mounted installation, compatible with equipment control cabinets
9. Multiple hardware protections, overcurrent, overvoltage, and overheat protection
10. Built in waveform monitoring to ensure RF output quality
11. Can work together with RF matching device
12. Industrial grade components, supporting 24-hour continuous operation
13. Anti interference design, suitable for semiconductor cleanrooms
14. Parameters can be configured to adapt to different etching and coating processes
15. Mostly used for semiconductor etching and PVD process equipment
AE 3156360-141 RF power supply, semiconductor equipment plasma process RF power supply unit.
Product detailed pictures：
3156360-141
product video
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