AMAT 0010-08581 Generator Input/Output Block
Product Manual：
AMAT 0010-08581 Generator Input/Output Block
Introduction: Application material DeviceNet RF power supply rack I/O module, compatible with 300mm semiconductor coating etching equipment RF generator signal conversion.
Equipped with DeviceNet bus interface, realizing communication between RF power supply and the main control of the whole machine
Multiple digital DI/DO channels, collecting interlock, valve, and safety circuit switch signals
Four channel analog AO/AI, transmission power, voltage, RF matching simulation parameters
Dedicated GPI RF generator interface, directly connected to RF power supply for transmitting control commands
Two dedicated interlocking interfaces ensure the safety of the cavity and interlock the shutdown logic
Onboard signal optocoupler isolation, resistant to strong electromagnetic interference from radio frequency, signal free from clutter
Adjustable DeviceNet address and baud rate, flexible and convenient networking configuration
The power terminal supports+15V and+24V machine standard power input
Panel MOD and NET status lights, quickly identify bus and channel faults
Metal enclosed shell, dust-proof and earthquake resistant, suitable for clean semiconductor workshops
Integrated overcurrent, short circuit, surge protection, automatic cut-off of abnormal output alarm
Terminal partition layout, clear differentiation of digital, analog, and bus interfaces for easy wiring
Wall mounted fixed bracket, firmly installed inside the RF cabinet
Real time uploading of RF power and cavity interlock status to the upper control system
Original factory equipped Endura/Ventura platform, the same model can be directly replaced with spare parts
Conclusion: AMAT 0010-08581 has stable RF signal acquisition and transmission, and is a core I/O spare part for semiconductor equipment RF generators.
Product detailed pictures：
0010-08581
product video
Other links
NI CPCI-3840 Single Board Computer
ACS-RTAC-01 64610805 Interface Module
BENTLY 3500/33 149992-01 Input/Output Module
Other links
NI SCXI-1001 Ac machine box
SCXI-1102 Voltage input mold piece
NI SCXI-1102B Input module block
