AMAT 0010-19188 Cooling Elevator Component

Product Manual：

AMAT 0010-19188 Cooling Elevator Component Product Features
Introduction: AMAT 0010-19188 is a semiconductor equipment specific wafer cooling and lifting integrated component, equipped with servo motors, temperature controlled and synchronized lifting.
Integrated Bosch servo drive, precise and smooth lifting action
Equipped with a water-cooling structure, it quickly stabilizes the wafer temperature
Ceramic bearing ejector pin, low dust production, protects the surface of the wafer
High precision positioning with minimal repetition error in lifting and lowering
Compatible with standard semiconductor process chambers, directly replacing original parts
Sealed structure suitable for vacuum chamber, no air leakage
Built in temperature sensing, real-time monitoring of cooling status

Adjustable lifting speed, suitable for different process rhythms
Overload and limit dual mechanical and electrical protection
Integrated assembly module, easy to disassemble and maintain
Low vibration operation to avoid wafer offset and damage
Corrosion resistant special material, suitable for process chemical environment
Small and compact structure, saving installation space inside the cavity
Standard wiring interface, compatible with equipment control system
Industrial long-life accessories reduce production line downtime frequency
Conclusion: AMAT 0010-19188 cooling elevator component integrates lifting and cooling, suitable for thin film deposition semiconductor equipment, with high process stability.

Product detailed pictures：

0010-19188

product video

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