AMAT 0010-57289 Wafer Rotary Transfer Robot
Product Manual：
AMAT 0010-57289 Wafer Rotary Transfer Robot
1. AMAT 0010-57289 is used for wafer transfer on Endura semiconductor platform
2. Rotate the telescopic arm to complete wafer picking and transfer
3. Ceramic gripper reduces particle pollution
4. Servo closed-loop, high positioning accuracy
5. With wafer inspection, identify whether there is any offset
6. Vacuum adsorption, stable clamping of silicon wafers
7. Adapt to working inside the vacuum chamber
8. Collision protection to prevent damage to the wafer
9. Fast action speed, meeting the production rhythm
10. Bus docking device main control system
11. Modular structure, easy disassembly and maintenance
12. Clean design, compliant with semiconductor dust-free requirements
13. Can work continuously for a long time
14. Output fault status for easy troubleshooting
15. AMAT 0010-57289 is compatible with the same series of chamber exchange materials
AMAT 0010-57289 wafer rotary transfer robot, used for 300mm wafer handling and exchange inside semiconductor equipment
Product detailed pictures：
0010-57289
product video
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