AMAT 0090-76133 Single Board Computer Module  

Product Manual：

AMAT 0090-76133 Single Board Computer Module
1. VME bus single board computer, card slot type plug-in installation
2. Motorola 68040 processor, responsible for equipment process calculation processing
3. On board DRAM and FLASH, storage firmware and process configuration
4. Ethernet interface, realizing communication and interaction between the upper computer of the device
5. Multiple RS232/422 serial ports, compatible with RF and MFC peripherals
6. Multi channel digital IO, processing interlocking, alarm, and trigger signals

7. Hardware watchdog, automatic reset upon system crash to ensure continuous operation
8. Save event logs locally for easy fault analysis and troubleshooting
9. 5V DC power supply, low overall power consumption, suitable for long-term operation
10. Wide temperature operation, suitable for internal working conditions of semiconductor cabinets
11. EMC electromagnetic compatibility to resist strong electromagnetic interference from equipment
12. Onboard status indicator light, intuitive identification of operational faults
13. Three proof coating, anti vibration and moisture-proof, suitable for production line environment
14. Multi card networking can be used to expand the overall control capability of the machine
15. Compatible with Centura and Endura series etching and deposition equipment
AMAT 0090-76133 single board computer module, VME architecture main control board, used for overall control of semiconductor wafer process equipment.

Product detailed pictures：

0090-76133

product video

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