AMAT 0100-00629 0100-00629 Generator Accessories
Product Manual：
AMAT 0100-00629 is a safety interlock component for RF generators, which controls the start stop safety circuit of RF power supply
1. Connect emergency stop, chamber door and other safety switches to cut off the RF output to protect the chamber
2. Dual channel redundant lines, single channel faults will not release the safety lock
3. Signal isolation circuit to resist false triggering of RF high-power electromagnetic interference
4. Real time collection of generator operating status, synchronized upload to equipment master control
5. Comes with a status indicator light to visually distinguish between normal/interlocking alarm states
6. PCB with dust-free three proof coating, resistant to process volatile gas corrosion
7. AMAT 0100-00629 has built-in surge protection, which prevents false shutdowns caused by power grid fluctuations
8. Standard terminal wiring, perfectly matched with the original RF generator
9. Automatically self check the circuit upon startup, quickly identify faults such as wire breakage and short circuit
10. Strengthen the solder pads and ensure stable circuit connection under continuous vibration of the production line
11. Quickly cut off response, lock RF power in case of ignition or air leakage
12. Reserve testing points, maintenance does not require dismantling the entire generator set
13. Strong and weak electrical zoning wiring, control signals are not affected by power circuit interference
14. Suitable for a wide temperature environment, the cabinet can operate continuously at high temperatures for a long time
15. AMAT 0100-00629 standard size, directly replace with spare parts of the same specification
AMAT 0100-00629 interlock response is reliable and is an essential safety accessory for etched deposition RF generators
Product detailed pictures：
0100-00629
product video
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