AMAT 0190-37798 Interlocking Module
Product Manual：
AMAT 0190-37798 Interlocking Module (Simplified 15 Points)
1. Compatible with AMAT Producer SE/E etching/film machine, MKS factory interlocking control unit
2. Collect signals from chamber doors, vacuum valves, emergency stops, and pressure safety switches
3. Hardware hard interlock logic, instantly cutting off RF, gas source, and heating power supply in case of abnormality
4. Optocoupler isolation of input and output, isolation of process cavity electromagnetic interference
5. Multi channel relay output, linked valve group, vacuum pump, and platform shutdown action
6. Independent channel status light, quickly locate door lock/vacuum/air source fault points
7. Real time uploading of security status to the device controller, triggering machine alarm and locking
8. Built in overcurrent and electrostatic protection, single channel failure does not affect the interlocking circuit of the whole machine
9. 24V standard industrial power supply, suitable for clean workshop power grid fluctuations
10. Metal sealed shell is dust-proof and moisture-proof, ensuring stable operation of the dust-free workshop for a long time
11. Equipped with a built-in fault code cache for quick troubleshooting of interlock anomalies during maintenance
12. Standard plug-in interface, cabinet disassembly and replacement without changing wiring
13. Seismic reinforcement components, capable of withstanding long-term vibration conditions of the machine
14. Parameter power-off memory, no need to reconfigure safety logic after restart
15. Same model original direct replacement, no need to rewrite the device safety program after replacement
AMAT 0190-37798 is a core safety protection interlock spare part for semiconductor process equipment.
Product detailed pictures：
0190-37798
product video
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