AMAT 0190-53752 Input/Output Module
Product Manual：
AMAT 0190-53752 Input/Output Module
AMAT 0190-53752 is a dedicated IO control board for pure water cooling systems in application material machines, which controls the water circuit sensing and solenoid valve driving of heat exchange circuits
1. Adapt to etching, CVD equipment heat exchange, and deionized water gamete system
2. Compatible with 24V digital and analog dual type feedback acquisition signals
3. The output circuit can drive the waterway solenoid valve and the logic control of the circulation pump
4. Closed loop signal acquisition and processing of flow meters and resistivity sensors
5. Hardware interlocking for water leakage and abnormal water pressure, instantly cutting off the waterway protection chamber
6. Channel optoelectronic isolation, isolating RF interference to avoid signal misjudgment
7. Built in multi-layer circuit protection against overvoltage, short circuit, and static electricity
8. Each channel is isolated from independent faults, and single channel abnormalities do not interrupt the overall process of the machine
9. Board channel indicator light, quickly locate the location of waterway signal faults
10. Equipped with signal filtering circuit to reduce distortion of on-site clutter signals
11. Lead free low release gas board, meeting the cleanliness standards of wafer cleanroom
12. Standard multi pin connector, with short disassembly, replacement, and maintenance time
13. Industrial high-temperature resistant substrate, supporting 24-hour uninterrupted continuous operation
14. Reinforce surface mount components to prevent virtual soldering during equipment vibration conditions
15. Compact card insertion structure saves installation space inside the control cabinet
In summary, AMAT 0190-53752 is responsible for monitoring and controlling the cooling water circuit of the machine, and is the core IO component of the semiconductor cavity temperature control system
Product detailed pictures：
0190-53752
product video
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