AMAT 0190-A5841 Dual Ion Pump Controller
Product Manual：
AMAT 0190-A5841 Dual Ion Pump Controller for Semiconductor Vacuum Equipment
1 AMAT 0190-A5841 rack standard, directly installed in the cabinet
2 dual channel independent control of two ion pumps, precise vacuum control
3. Stable high-voltage output, real-time monitoring of chamber vacuum degree
4 shielded circuits to resist electromagnetic interference in the workshop
5. Fast signal feedback, no delay in pump body adjustment
6. Good heat dissipation, low temperature rise during long-term operation
7 wide temperature operation, adapted to the temperature difference environment of the process chamber
8. Suitable for original equipment of application materials, no need for modification
9 has multiple protections against overcurrent, overvoltage, and leakage
10 compact body, saving cabinet installation space
11 supports 24/7 uninterrupted production process
12 metal shell dust and shock resistant, suitable for various vacuum production lines
13 standard wiring ports, easy to maintain and disassemble
14 supports data communication, facilitating device status monitoring
15 AMAT 0190-A5841 parameters are consistent with the original, with good compatibility for replacement
The AMAT 0190-A5841 dual ion pump controller has stable performance and is a replacement part for semiconductor vacuum equipment maintenance
Product detailed pictures：
0190-A5841
product video
Other links
EMERSON VE3008 CE3008 KJ2005X1-MQ1 12P6381X032
PCD530A102 3BHE046836R0102 GFD563A102
REC670 BayControlDisplay 1MRK000008-NB
Other links
TRICONEX AO3481 Output module
HIMA K9202 Fan components
HIMA K9202B Fan components
