AMAT 0190-B6280 Gate Valve
Product Manual：
AMAT 0190-B6280 Gate Valve Product Features
AMAT 0190-B6280 is a specialized gate valve for semiconductor vacuum chambers, used for isolating chambers, switching vacuum paths, and adapting to high-purity coating and etching production lines. Its characteristics are as follows:
High purity stainless steel valve body, free of impurities, ensuring the cleanliness of the wafer process
Metal sealed gate structure, excellent ultimate vacuum sealing performance of the chamber after shutdown
Pneumatic driven actuator, fast opening and closing response, smooth and impact free action
Built in position sensing sensor, providing real-time feedback on the fully open/fully closed status of the valve
Independent cooling channel design, able to withstand high temperature process environment in the chamber without deformation
Wear resistant special seals, with longer service life under frequent opening and closing conditions
Standardized vacuum flange interface, can directly match equipment pipelines without the need for modification.
Integrated pressure overload protection, automatic locking of gate position in case of abnormal gas source
Split modular structure, seals and sensors can be disassembled and replaced separately
Low friction transmission components, not prone to jamming or lagging during long-term continuous operation
Compatible with inert and corrosive process gases, resistant to chemical media erosion
Small and compact appearance, the cabinet cavity can also be installed and arranged in a small space
The signal communication interface can be connected to the equipment master control to achieve automated linkage control
Original factory uniform installation size, direct replacement of spare parts of the same model for easy machine debugging
AMAT 0190-B6280 gate valve has reliable sealing and high cleanliness, and is a key vacuum component for isolating semiconductor vacuum equipment chambers.
Product detailed pictures：
0190-B6280
product video
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