AMAT 1350-00681 Capacitive Pressure Gauge
Product Manual：
AMAT 1350-00681 Capacitive Pressure Gauge
AMAT 1350-00681 is a specialized capacitive vacuum pressure sensor for application material wafer equipment, which accurately monitors chamber process pressure.
1. Original factory compatible AMAT etching and deposition vacuum machine, installation interface matching
2. Principle of capacitance film induction, high measurement accuracy and small temperature drift
3. Stainless steel clean contact surface, resistant to various process corrosive gases
4. Built in temperature compensation circuit, stable long-term measurement values
5. Standard analog voltage signal output, directly connected to the main control system of the equipment
6. Overload pressure protection structure, the diaphragm is not easily damaged by pressure relief impact
7. KF standard vacuum flange, dust-free chamber disassembly and reliable sealing
8. Low latency pressure feedback to meet real-time interlocking control of the process
9. The whole machine is made of non-volatile materials and meets the standards of semiconductor clean rooms
10. Small integrated structure, space saving for cabinet cavity installation
11. Internal EMI shielding, resistant to RF electromagnetic interference without garbled code
12. 24V DC standard power supply, compatible with the general power circuit of the machine
13. Seismic reinforcement of internal components, ensuring stable and continuous operation of the production line
14. Can be calibrated separately, maintenance does not require disassembly or replacement of the entire machine
15. Equipped with built-in fault self check and quick feedback alarm for abnormal signals
In summary, the AMAT 1350-00681 capacitive pressure gauge has precise measurement, corrosion resistance, and cleanliness, making it a core component for pressure monitoring in semiconductor vacuum chambers.
Product detailed pictures：
1350-00681
product video
Other links
Agilent E1406A analog input/output module
3BHE006805R0002 Distributed module
DDC779BE02 Distributed module
Other links
CI867K01 3BSE043660R1 processor module
YOKOGAWA CP451-10 processor module
GE IC754VSF12CTD Touch screen
