Edwards A90702983 Semiconductor Dry Vacuum
Product Manual：
Edwards A90702983 Semiconductor Dry Vacuum Pump
1. Oil free dry structure, outputting clean vacuum without oil pollution
2. Suitable for semiconductor etching, CVD process cavity pumping
3. Pump body anti-corrosion treatment, resistant to corrosive process exhaust gas
4. High pumping speed, capable of quickly completing cavity vacuuming operations
5. Built in air-cooled heat dissipation, supporting continuous production for 7 × 24 hours
6. Integrated multiple protections for overload, overheating, and abnormal pressure
7. Vibration control optimization to reduce disturbance to precision components of the machine
8. Real time collection of rotational speed, temperature, and load operating parameters
9. Complete communication interfaces, compatible with the main control system of the machine
10. Alarm signal output, abnormal status can be uploaded to the upper computer
11. Anti dust deposition, suitable for process by-product conditions
12. Modular pump body design, easy on-site maintenance and disassembly
13. Compact body, saving installation space at the bottom of the device
14. Fault log storage for easy fault tracing and troubleshooting
15. Original spare parts specifications, good compatibility for replacement
Edwards A90702983 semiconductor dry vacuum pump, semiconductor process pre stage pumping equipment, corrosion-resistant gas, ensuring stable negative pressure environment in the vacuum chamber.
Product detailed pictures：
A90702983
product video
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