EDWARDS STP-H1303CV3 Turbomolecular Pump
Product Manual：
EDWARDS STP-H1303CV3 Turbomolecular Pump Product Features
EDWARDS STP-H1303CV3 is a high-speed turbo molecular pump specifically designed for semiconductor vacuum chambers, providing a clean vacuum environment and suitable for etching and deposition equipment. Its features are as follows:
High speed impeller structure, quickly extract chamber gas to achieve high vacuum
Multi stage composite blade design, high pumping efficiency, excellent ultimate vacuum degree
Ceramic bearing structure, low wear, extends continuous operation life
Built in water-cooled cooling channel, stable temperature control during long-term full load operation
All metal sealed structure, free from oil and volatile substances, meeting dust-free process standards.
Equipped with vibration detection sensors, any abnormal vibrations will promptly trigger an alarm and shut down the machine
Integrated driver control circuit, integrated design saves installation space
Multiple protection mechanisms, automatic protection of pump body against overcurrent, overheating, and overload
Standard flange interface, can directly connect to various vacuum chamber pipelines
Low operating noise, suitable for low noise requirements in clean workshops
Support real-time data communication, synchronous upload of speed and vacuum parameters to the main control
Anti dust intake filter screen, blocking impurities from entering the impeller and causing damage
Smooth control of start stop program to avoid impact damage to internal components
Modular accessory structure, easy maintenance and replacement of parts operation
Original factory standardized size, same specification pump body replacement does not require pipeline modification
EDWARDS STP-H1303CV3 turbo molecular pump has excellent vacuum performance and high cleanliness, and is the core vacuum spare part for semiconductor equipment to obtain high vacuum.
Product detailed pictures：
STP-H1303CV3
product video
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