ESA80W-HDF dry vacuum pump

Product Manual：

ESA80W-HDF
1. Ebara Roots dry structure, fully oil-free pumping operation throughout the process
2. Suitable for efficient extraction of lightweight process gases such as hydrogen
3. Rapid pumping and pressure building for large vacuum chambers
4. The rotor speed can be automatically and intelligently adjusted according to the intake load
5. Corrosion resistant alloy inner cavity, resistant to mild corrosive process exhaust gas
6. The overall structure of the aircraft is compact, and the clean room occupies a smaller area
7. Low vibration and low noise operation, without interfering with precision equipment positioning
8. Automatically slow down during idle periods to reduce overall power consumption
9. Equipped with a touch panel, various operating parameters can be set on-site

10. Real time monitoring of temperature, current, and intake pressure status
11. Automatic interlocking shutdown protection for overload, high temperature, and stuck faults
12. Support communication docking with the factory’s central control system for remote control of data
13. Optional exhaust modification structure, capable of handling volatile gases from organic solvents
14. No need to regularly add lubricating oil, only clean the intake filter element on a daily basis
15. Commonly used in semiconductor airlock, photovoltaic coating, MO-CVD process
Summary: ESA80W-HDF is a dry vacuum pump specifically designed for industrial clean processes, responsible for pre chamber rough pumping operations. It is clean, durable, easy to operate, and suitable for vacuum matching in optoelectronic and semiconductor mass production.

Product detailed pictures：

ESA80W-HDF

product video

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