General 97-2154-000 Single Board Computer
Product Manual：
#General 97-2154-000 Single Board Computer
1. Real time calculation and processing of local process parameters for semiconductor process equipment
2. On site I/O signal acquisition and logic judgment of etching and coating equipment
3. Summary and analysis of pressure and temperature data from various sensors on the machine
4. Real time monitoring and execution control of local safety interlock logic for equipment
5. Analysis and output of basic control instructions for servo axis motion
6. Local fault information collection, preliminary judgment, and data caching storage
7. Upstream main control command reception disassembly, driving on-site execution of component actions
8. Local timing scheduling of gas, water, and vacuum valve timing linkage
9. Communication transfer on the production line, docking with the upper computer to issue production process formulas
10. Real time monitoring of chamber working conditions, preliminary warning of abnormal data on site
11. Status acquisition and control of auxiliary equipment such as RF power supply and vacuum pump
12. Simple calculation of local temperature drift compensation for clean room equipment
13. Automated film replacement process, step-by-step control logic operation
14. Local recording of daily device operation logs and temporary data caching
15. This General 97-2154-000 industrial grade single board computer is suitable for semiconductor harsh working conditions, resistant to dust electromagnetic interference, and can stably undertake on-site edge control tasks
In summary, General 97-2154-000 has a compact structure and high integration, which can operate continuously and stably for a long time, share the main control load, and ensure the stable operation of equipment basic processes
Product detailed pictures：
97-2154-000
product video
Other links
611EAAK0105 interface board
408984045 Ethernet module
3HE05581ABAB01 DC power module
Other links
611EAAK0105 interface board
408984045 Ethernet module
3HE05581ABAB01 DC power module
