GENESIS GHW55A-13DF4L0 RF Generator
Product Manual：
GENESIS GHW55A-3DF4L0 RF Generator
GENESIS (ENI/MKS) GHW55A-13DF4L0 is a mainstream 13.56MHz, 5500W solid-state RF plasma power supply in the semiconductor industry, widely matched with TEL etching/deposition equipment.
core parameters
Model: GHW55A-13DF4L0 (GHW55A series)
Frequency: 13.56 MHz (Industry Standard RF)
Output power: 5500 W (5.5 kW), impedance 50 Ω
Input: Three phase AC 208/230V, 50/60Hz
Interface: 15 pin analog interface, N-type RF output
Size: Standard 19 inch rack, height 3U
Cooling: air-cooled, working temperature 0-40 ℃
Application: Semiconductor etching PECVD、 Sputtering, plasma cleaning
key features
High power solid-state design, reliability superior to electronic tube power supply
Accurate power stability, ± 0.5% accuracy, suitable for precision processes
Fast automatic matching, millisecond response, reducing process fluctuations
Improve protection mechanisms: over temperature, over current, over voltage, short circuit, and reflected power over limit protection
Remote/local control, supporting analog and serial communication
Long lifespan and low maintenance, semiconductor production line 24/7 continuous operation verification
TEL factory adaptation, replacing spare parts such as 3D80-000835-V1
Low harmonic interference, compliant with SEMI and EMC standards
Fault self diagnosis, LED status indication+remote alarm
Wide adjustable power range, 50-100% continuously adjustable
Sturdy and vibration resistant structure, suitable for harsh industrial environments
Maintain parameters during power failure, no need to reset during restart
Redundant design is optional, and backup of key components enhances availability
Quick replacement, standard interface, and reduced downtime
Global after-sales support, MKS factory repair and calibration services
Product detailed pictures：
GHW55A-13DF4L0
product video
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