HITACHI CX3202 Controller
Product Manual：
HITACHI CX3202 is a Hitachi International Electrical Semiconductor Furnace Tube Gas Temperature Control Controller, used for diffusion and thin film heat treatment equipment
Original factory matching furnace tube dedicated control unit, can directly replace original parts
Accurate control of gas flow and heating temperature inside the furnace, with strong process stability
Multi channel signal, linked flow meter, thermocouple, solenoid valve
Equipped with a communication diagnostic interface, it is convenient to interface with the main control system of the device
Multiple sets of status indicator lights on the panel, with intuitive display of power, communication, and faults
Built in closed-loop adjustment algorithm, with small fluctuations in temperature and airflow, reducing process deviations
Metal sealed shell, resistant to high temperature and workshop electromagnetic interference
Integrated multiple protections for overheating, communication abnormalities, and gas supply shortages
Independent heat dissipation duct, controllable temperature rise during long-term high-temperature operation
Standardized industrial interface, easy disassembly and replacement, reducing downtime
Full board moisture-proof and anti-corrosion coating, suitable for semiconductor clean room environment
Reinforce internal wiring to prevent easy detachment and disconnection under equipment vibration
Support multi segment process curve storage and adapt to different wafer processes
Wide temperature components, suitable for alternating cold and hot environments around the furnace body
Japanese original industrial parts with low failure rate for continuous operation 24/7
Summary: The HITACHI CX3202 controller has high temperature and gas control accuracy and is the core supporting control module for semiconductor heat treatment furnace tubes.
Product detailed pictures：
CX3202
product video
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