INFICON SPC-953-G1 gas analyzer
Product Manual：
INFICON SPC-953-G1 gas analyzer
Introduction: INFICON SPC-953-G1 vacuum gas analyzer, specialized for semiconductor chambers, real-time monitoring of gas composition and impurity content inside the vacuum.
Trace gas detection, capable of identifying ppm level trace impurity gases
Wide quality inspection range, covering various reaction gases commonly used in the process
Built in corrosion-resistant intake components, compatible with corrosive gases such as etching and coating
The ion source has a long lifespan and can be replaced separately on site, with low maintenance costs
Real time continuous sampling, synchronized feedback of chamber gas status
Equipped with dual compensation for pressure and temperature, stable measurement values
Ethernet communication, directly connected to the main control of the machine to upload detection data
Custom concentration alarm threshold, exceeding the limit automatically triggers an alarm
Multiple circuit protection for the entire machine, preventing overvoltage, short circuit, and electrostatic damage
Equipped with a built-in fault self checking program, quickly locate sampling and sensing faults
Low noise signal acquisition, no loss of weak gas signals
Standard vacuum flange interface, easy to disassemble and replace, sealed well
Metal sealed body, dust-proof and suitable for dust-free workshop conditions
Compact modular structure, saving installation space on cabinet and cavity side
Support 24-hour uninterrupted online monitoring, suitable for mass production lines
Conclusion: INFICON SPC-953-G1 has precise and durable detection, and is a core gas monitoring spare part for semiconductor thin films and etching equipment.
Product detailed pictures：
SPC-953-G1
product video
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