JEOL BP101865-00 Wafer Controller Module    

Product Manual：

JEOL BP101865-00 Wafer Controller Module
1. Compatible with JEOL semiconductor electron beam detection equipment
2. JEOL BP101865-00 wafer controller module controls the movement of wafer stage
3. Receive position instructions and synchronously collect real-time position signals from the platform
4. Built in filtering circuit to reduce positioning deviation caused by electromagnetic interference
5. Card insertion specifications are compatible with the original factory chassis and support direct replacement
6. JEOL BP101865-00 Wafer Controller Module Adaptation Device Bus Communication Standard
7. Equipped with surge isolation protection to safeguard precision control circuits

8. Optimize wiring layout to ensure stable closed-loop control signals
9. The connector pins are perfectly matched with the original board
10. Long term continuous operation, stable positioning control performance
11. Push abnormal movement information of the carrier to the main control system
12. Adapt to the constant temperature and dust-free working environment of the electron microscope room
13. The motion control circuit is independently partitioned for easy troubleshooting
14. Rapid signal response ensures wafer positioning accuracy
15. Follow JEOL original hardware and electrical specifications
The JEOL BP101865-00 wafer controller module serves as the carrier control core, achieving precise wafer transfer and positioning control.

Product detailed pictures：

BP101865-00

product video

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